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| The ion assist solution
to your vacuum coating problems! |

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Dr.
Clive Burton
President of DIGI Mount
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Do you have coating adhesion problems?
Do you have poor abrasion resistance?
Do you have unacceptable absorption?
Do you deal with fussy materials like MgF2?
Does your present ion gun fail in the middle of a run - or is it a gas hog, a
pain to maintain, pitifully weak in actual ion current delivered?
DIGI Mount promotes and facilitates sales of gridless ion beam systems
that can solve these problems.
DIGI Mount also provides consulting advice in designing and
implementing both ion-assisted evaporative and DC reactive sputter deposition
systems.
Uses of Ion Guns
Space Race Heritage: Ion guns first evolved from attempts to provide
efficient propulsion for space vehicles.
Ion beam sources are used in essentially two different modes:
Preclean
- An ion gun can be used for a preclean step immediately before
evaporation
- Gold films deposited by an evaporation-only method, using cold
substrates, adhere very poorly.
- In contrast, gold films deposited with an ion gun preclean can have such
superb adhesion that attempts to remove the gold from a glass surface will
result in breakage of the glass itself rather than the bond between it and
the gold film!
- Glow Discharge precleaning is ineffective because:
- it takes place early in the pump down cycle so the substrate has time
to re-contaminate before deposition
- the energies and fluxes are relatively low
Ion Assisted Deposition IAD (or Ion Beam Assisted Deposition IBAD)
- These gridless ion sources can provide ion beam currents up to a total
of 2.5 Amps which is sufficient to make significant improvements to the
properties of vacuum evaporated thin films even in quite a large chamber.
These improvements include:
- much better primary adhesion as discussed above
- much higher film density so that the films are much less sensitive to
the ingress of water.
- consequent upon the higher film density – significantly higher
refractive indices which allow more design flexibility and better optical
performance.
- better stoichiometry and lower optical absorption
- the ability to tailor the properties of each layer in a multilayer
stack so that the overall stack may have the most appropriate durability
parameters including those related to abrasion resistance i.e. stress,
hardness and lubricity.